Ua ke nrog cov kev ua tau zoo ntawm cov tsoos al2o3 thiab boo dastride thermal tas li (ALN) Silicon, thiab hluav taws xob rwb thaiv tsev rwb thaiv tsev, yog cov khoom siv zoo tshaj plaws rau cov hluav taws xob substrates thiab ntim khoom hauv kev lag luam microelectronics. Nws tseem yog ib cov khoom tseem ceeb rau cov kev kub siab thiab cov khoom siv hluav taws kub zoo thiab cov khoom siv hluav taws xob zoo thiab tshuaj lom neeg ruaj khov.

Lub theoretical Density ntawm aln yog 3.26g / cm3, lub mohs hardness yog ntau dua 1016ωm, thiab lub thermal expansivity yog 3.5 × 10-6 / ℃ (chav tsev kub ntawm 200 ℃). Cov ntshiab aln ceramics muaj xim tsis muaj xim thiab pob tshab, tab sis lawv yuav muaj ntau xim zoo li grey, greyish dawb lossis lub teeb daj, vim yog qhov tsis txaus ntseeg.

Ntxiv nrog rau siab thermal conductivity, aln ceramics tseem muaj cov txiaj ntsig hauv qab no:

1. Kev rwb thaiv hluav taws xob zoo;

2. Zoo ib yam li cov hluav taws xob nthuav dav coefficient nrog silicon monocrystal, zoo dua rau cov ntaub ntawv xws li Al2o3 thiab Beo;

3. Muaj zog dua thiab zoo sib xws zoo sib xws Flexural zog nrog al2o3 ceramics;

4. Mob Dielectric tas li thiab dielectric ploj;

5. Piv nrog boo, lub thermal conductivity ntawm aln ceramics tsawg dua cuam tshuam los ntawm kub, tshwj xeeb tshaj yog tshaj 200 ℃;

6. Kev kub siab tsis kam thiab corrosion tsis kam;

7. Tsis muaj tshuaj lom;

8. Thov ua ntawv thov rau semiconductor kev lag luam, tshuaj lom neeg hlauurgy kev lag luam thiab lwm thaj chaw muaj kev lag luam.