Into uqobo lwayo

I-Aluminium nitride (ALN)

Kuhlanganiswe nezinzuzo zokusebenza eziphelele zendabuko ye-Al2o3 ne-Beo substrate impahla, i-aluminium nitride (i-ALN), enobuhlakani obuphakeme bokuphamba (i-monocrystal I-Coeffient ekhuphukayo ehambelana ne-Crystal Silicong eyodwa, kanye nezakhiwo ezinhle zokufakwa kukagesi, kuyinto ekahle yokufaka kagesi, okufakwayo kwama-subxtrates wesekethe nokupakishwa embonini ye-microelecton. Kubuye kube yinto ebalulekile yezingxenye eziphakeme zokushisa kwezakhiwo ze-ceramic zezakhiwo zezakhiwo ngenxa yezakhiwo ezinhle kakhulu zemishini yokushisa, izakhiwo ezishisayo kanye nokuqina kwamakhemikhali.

Ubuningi be-theoretical of aln ngu-3.26g / cm3, ubulukhuni be-mohs bungu-7-8, ukumelana nokushisa kwekamelo kukhulu kune-1016 × 10-6 / ℃ (lokushisa legumbi lokushisa lama-200 ℃). I-aln ceramics emsulwa ayinamibala futhi esobala, kepha izoba yimibala ehlukahlukene efana nempunga, i-grey White noma ikhanye ephuzi, ngenxa yokungcola.

 

Ngaphezu kokuvuselelwa okuphezulu okushisayo, ama-aln ceramics nawo abe nezinzuzo ezilandelayo:

1. Ukufakelwa okuhle kukagesi;

2. Okufana okufana nokwandiswa kwe-armal nge-silicon monocrystal, okuphakeme kunezezinto ezinjenge-al2o3 ne-beo;

3. Amandla aphezulu wemishini kanye namandla afanayo aguqukayo ane-Al2o3 ceramics;

I-4

5

I-6. Ukumelana nokushisa okuphezulu nokumelana nokugqwala;

7. non-atchic;

8. Kusetshenziswe embonini ye-semiconductor, imboni yeMetallurgy yamakhemikhali nakwezinye izinkambu zezimboni.

Uhlu lomkhiqizo